1 EXAMPLE 23. MODEL WITH CROSSED AND NESTED EFFECTS: SCONDUCT DATA 1 19:38 Sunday, December 30, 2001 The GLM Procedure Class Level Information Class Levels Values ET 4 1 2 3 4 WAFER 3 1 2 3 POS 4 1 2 3 4 Number of observations 48 1 EXAMPLE 23. MODEL WITH CROSSED AND NESTED EFFECTS: SCONDUCT DATA 2 19:38 Sunday, December 30, 2001 The GLM Procedure Dependent Variable: RESIST Sum of Source DF Squares Mean Square F Value Model 23 9.32500833 0.40543514 3.65 Error 24 2.66758333 0.11114931 Corrected Total 47 11.99259167 Source Pr > F Model 0.0013 Error Corrected Total R-Square Coeff Var Root MSE RESIST Mean 0.777564 5.553811 0.333391 6.002917 Source DF Type III SS Mean Square F Value ET 3 3.11215833 1.03738611 9.33 WAFER(ET) 8 4.27448333 0.53431042 4.81 POS 3 1.12889167 0.37629722 3.39 ET*POS 9 0.80947500 0.08994167 0.81 Source Pr > F ET 0.0003 WAFER(ET) 0.0013 POS 0.0345 ET*POS 0.6125 Contrast DF Contrast SS Mean Square F Value ET1 VS ET2 IN POS1 1 0.21660000 0.21660000 1.95 Contrast Pr > F ET1 VS ET2 IN POS1 0.1755